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Scanning Electron Microscopes

The Unit has three scanning electron microscopes available for staff and student use: The FEI NovaNano SEM, the Tescan MIRA3 RISE SEM and the Leo 1450 SEM. The instruments can be booked in advance for as long as is required for a particular experiment subject to user demand at that particular time. The Unit offers training in the operation of these instruments.

  • FEI Nova NanoSEM

    Field Emission Gun (FEG) high resolution SEM.
    Everhardt-Thornley SED
    In-lens SE detector (TLD-SE)
    In-lens BSE detector (TLD-BSE)
    Oxford EDX system including X-ray mapping with INCA data acquisition software,
    Nordlys Oxford EBSD detector with Flamenco data acquisition software,
    STEM BF DF HAADF detector,
    UHR Low vacuum Secondary detector
    UHR low vacuum Backscatter detector
    Nanoparticle X-ray mapping using STEM detector.
    Resolution @ optimum WD (High vacuum)
    1.0 nm @ 15 kV (TLD-SE)
    1.6 nm @ 1 kV (TLD-SE)
    0.8 nm at 30 kV (STEM)

    Resolution @ optimum WD (Low vacuum)
    1.5 nm @ 10 kV
    1.8 nm @ 3 kV

  • Tescan MIRA3 RISE SEM

    Tescan MIRA3 GMU Univac;
    Secondary Electron Detector
    Retractable Backscatter detector
    In-Beam BSE detector
    Beam Deceleration Mode
    Decontaminator ( XEI)
    Variable Pressure mode

    E-Beam Lithography
    Beam Blanker,
    Drawbeam Advanced and Drawbeam Offline software

    Motorized WITec Confocal Raman Imaging Extension for SEM,
    The Confocal Raman Imaging Extension includes:
    • WITec Confocal Raman Microscope base for SEM systems
    • Motorized WITec multiwavelength laser
    • Motorized and software controlled spectral calibration unit
    Adaptor for coupling to MIRA SEM


  • Leo 1450 SEM

    Tungsten or LaB6 filament,
    200V to 30kV accelerating voltage with automatic EHT bias
    3.5nm resolution @ 30kV (tungsten), 2.5nm @ 30kV (LaB6)
    Magnification range 15x to 100kx
    Secondary electron detector
    4-quadrant solid-state backscattered detector
    Cryo-SEM stage and Fisons transfer unit.
    Bruker XFlash EDS Si Drift Detector
    Bruker Quantax microanalysis software
    Unique Optibeam column control algorithm